Products: 8 to 12 Inch Target for Advanced Packaging
Material | Purity | Configurations |
Al & Al alloy | 5N, 5N5 | NMC Oerlikon (Balzer) TM NEXX TM Aviza (Trikon) TM Tango TM AMAT TM |
Cu | 4N5,5N, 6N | |
CuP | 3N5, 4N5,5N | |
Ti | 4N5, 5N | |
Ni | 4N, 4N5 | |
NiV, NiPt | 3N5,4N | |
WTi | 3N5,4N,4N5 | |
Ag | 4N,5N | |
Au | 4N, 5N | |
Pt | 4N,5N |