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TEL Deep Trench Silicon Etcher 

5 loader ports, 300mm FOUP
4 Deep Trench Silicon Etcher (SCCM) Super Capacitively Coupled Module Chambers
40MHz and 3.2MHz dual Frequency Source (GEW3040 and NOVA50A)
ESD chuck,Temperature Control


More details, please download.









More details, please download.
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About Us | IR Inspection System | SOI wafer | Silicon Wafer| Used Semiconductor Equipment | Sputtering Targets & Evaporation Materials | Contact Us
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